JPH0418309U - - Google Patents
Info
- Publication number
- JPH0418309U JPH0418309U JP5940590U JP5940590U JPH0418309U JP H0418309 U JPH0418309 U JP H0418309U JP 5940590 U JP5940590 U JP 5940590U JP 5940590 U JP5940590 U JP 5940590U JP H0418309 U JPH0418309 U JP H0418309U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic sensor
- conductor
- ceramic
- moving table
- type electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990059405U JPH0750646Y2 (ja) | 1990-06-05 | 1990-06-05 | セラミック形静電センサ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990059405U JPH0750646Y2 (ja) | 1990-06-05 | 1990-06-05 | セラミック形静電センサ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0418309U true JPH0418309U (en]) | 1992-02-17 |
| JPH0750646Y2 JPH0750646Y2 (ja) | 1995-11-15 |
Family
ID=31585871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990059405U Expired - Lifetime JPH0750646Y2 (ja) | 1990-06-05 | 1990-06-05 | セラミック形静電センサ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750646Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143215A (ja) * | 1982-02-19 | 1983-08-25 | Taiheiyo Kogyo Kk | 電波シ−ルド用透明窓板 |
| JPS59148841A (ja) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | 圧力センサ |
-
1990
- 1990-06-05 JP JP1990059405U patent/JPH0750646Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143215A (ja) * | 1982-02-19 | 1983-08-25 | Taiheiyo Kogyo Kk | 電波シ−ルド用透明窓板 |
| JPS59148841A (ja) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | 圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0750646Y2 (ja) | 1995-11-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |